Overview of recent projects with Direct Laser Lithography

Maša Klenovšek
Department of Complex Matter, IJS


I will briefly present laser lithography which is available on JSI in Nanocenter. Technique of direct laser lithography enables projection of complex patterns onto substrate coated with photoresist. Using a guided laser source for the illumination, we can shape wide range of different designs. Near-UV laser source, paired with acousto-optic deflectors (AOD) and a system guided by a software provide us with precise and fast exposure tool, with resolution of 1 µm. Lithographic process will be briefly introduced with an emphasis on the achievements.

Spotlight will be on potential applications and examples of some latest projects. I will present some results of fabrication from the field of microfluidics, device fabrication, patterning of electrical contacts, and stencil lithography.

The seminar will take place via Zoom. The details for connecting to the meeting can be found below:

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Meeting ID: 970 4699 5988
Passcode: 851027

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