Nanolithography

The ProtoLaser LDI is an universal, high-resolution, table top laser direct imaging (LDI) system for prototyping on resist-covered substrates. A transferred image has even better defined edges compared to conventional lithography. With a working area of up to 100 x 100 mm and structures down to 1 μm it is an ideal tool for microfluidic designs.
Using 100 kHz beam positioning by acousto-optic deflectors, extremely fast writing is possible. Illumination of a typical microfluidic circuit only takes a few minutes. Automated measurements compensate for unevenness of the substrate and applied resists.
All job preparation steps are controlled via intuitive software controls.
The ProtoLaser LDI dedicated user interface supports DXF files and also enables CAD design. A variety of built-in functions makes designing of a microfluidic circuit very easy and efficient. Different laser tools and algorithms can be selected to optimize the process for speed and the finest structures.
The UV laser based LPKF ProtoLaser LDI structures on UV resist-covered substrate – directly from CAD. There is no need for expensive mask alignment equipment and to wait for costly masks. The process can be utilized on different flat substrates without any special environment conditions. The substrate is just inserted using a standard or custom designed cartridge, which is simply pushed into the ProtoLaser LDI slot.
As the process is contact-less, there is no tool wear-out. This virtually eliminates running costs.
LDI Protolaser ia available at CENN Nanocenter.